Pressure sensor and use thereof in a fluid tank
AssigneeSilicon Micro Sensors GmbH
InventorsJens Koehler, Lars Petersen, Sebastian Hagedorn
Life of this patent
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Abstract
A pressure sensor in contact with an aggressive fluid for a pressure measurement has a board with a pressure passage. The pressure passage is closed on one side by a sensor chip as a pressure sensing element. The board also mounts an integrated circuit and electrical contacts for electrical contacting of the pressure sensor. At least the on board arranged pressure sensing element as well as the integrated circuit are tightly enclosed by a capper made of a fluid resistant material in connection with the board, and are arranged in an encasing cavity formed by the capper and the board for fluid resistant protection.
Claims11
Pressure sensor for measuring pressure of a fluid, comprising:
- a board with a pressure passage open on one side of the board and closed on an other side by a board mounted pressure sensing element, the sensing element comprising a sensor chip, the one side of the board being exposed to the fluid,
- electrical contacts arranged on the board for electrical contacting of the pressure sensor,
- a board mounted integrated circuit for processing and forwarding of electrical signals of the pressure sensing element electrically connected with the pressure sensing element and at least one of the electrical contacts,
- a capper tightly connected with the board, so that at least the pressure sensing element and the integrated circuit are tightly enclosed by the capper, the capper being exposed to the fluid and comprising a material chemically resistant to the fluid, and
- supplemental means providing chemically resistant protection against the fluid at least of the pressure sensing element and the integrated circuit, wherein the supplemental means is arranged in an encasing cavity formed by the capper and the board.
Dependencies are inferred from the claim text.