Displacement detection device and method
AssigneeKabushiki Kaisha Toshiba
InventorsKazuo Watabe, Takashi Usui, Hideaki Okano, Akihito Ogawa, Yasuhito Ueda, Shinichi Tatsuta, Yuji Kubota
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AssigneeKabushiki Kaisha Toshiba
InventorsKazuo Watabe, Takashi Usui, Hideaki Okano, Akihito Ogawa, Yasuhito Ueda, Shinichi Tatsuta, Yuji Kubota
Estimating the term…
According to one embodiment, a displacement detection device includes a light source, objective lens, beam splitter, aperture limiting element, and detection device. The beam splitter may separate reflected light into portions. The reflected light may be reflected by the medium and then transmitted through the objective lens. The aperture limiting element may include an aperture limited so as to block a portion of the reflected light. The detection device may detect displacement of the medium in a direction of the optical axis based on the reflected light having passed through the aperture limiting element.
A displacement detection device comprising:
A displacement detection method comprising:
Dependencies are inferred from the claim text.