Micromechanical resonator with enlarged portion
OwnerGavin Hoinventor
Life of this patent
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Abstract
An apparatus with a micromechanical acoustic resonator formed on a substrate and enclosed in a cavity in the substrate. The resonator is partially suspended in the cavity. The resonator is shaped with a primary portion, and a first enlarged portion, where the primary portion is connected to the substrate, and the first enlarged portion is connected to one end of the primary portion. A capacitor connected in series to the resonator, and located external to the resonator cavity. The resonator is made of a compensating material and a piezoelectric material in between a first conductive film and a second conductive film.
Claims19
An apparatus comprising:
- a substrate comprising an electrical network,
- the electrical network further comprising:
- a micromechanical acoustic resonator formed on the substrate and enclosed in a cavity in the substrate, the resonator is partially suspended in the cavity, the resonator comprising a piezoelectric material, a conductive material, a primary portion, and a first enlarged portion,
- the primary portion is connected to the substrate, and
- the first enlarged portion is connected to one end of the primary portion, wherein the first enlarged portion has an irregular profile.
An apparatus comprising:
- a micromechanical acoustic resonator formed on a substrate and enclosed in a cavity in the substrate, the resonator being partially suspended in the cavity, the resonator is shaped with a primary portion, and a first enlarged portion, where the primary portion is connected to the substrate, and the first enlarged portion is connected to one end of the primary portion;
- a capacitor connected in series to the resonator, the capacitor being located external to the cavity;
- wherein the resonator is made of a piezoelectric material in between a first conductive film and a second conductive film and a compensating material;
- and
- wherein the first enlarged portion has an irregular profile.
Dependencies are inferred from the claim text.