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US 8,513,631 B2Granted
Light processing apparatus
AssigneeUshio Denki Kabushiki Kaisha
InventorsMasatoshi Shimonaka, Keita Yoshihara, Akinobu Nakashima
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Abstract
A light processing apparatus irradiates an ultra violet light through a square or a rectangular light transmitting window onto a work piece that has a square or rectangular pattern formation portion. The apparatus includes a light emitting unit that comprises a casing, an ultraviolet irradiance lamp arranged inside the casing and the light transmitting window member provided in one face of the casing. One side of the light transmitting window and one side of the pattern formation portion are not parallel to each other.
Claims10
A light processing apparatus comprising:
- a light emitting unit comprising a casing, an ultraviolet light irradiating lamp arranged in the casing and a square or rectangular light transmitting window;
- the lamp is configured to irradiate an ultraviolet light onto a work piece through the window, the work piece comprises a square or rectangular pattern formation portion;
- and
- one side of the window is configured not to be in parallel or perpendicular with one side of the pattern formation portion.
1 more element
Dependencies are inferred from the claim text.