Atom probe
AssigneeCameca Instruments, Inc.
InventorPeter Panayi
Life of this patent
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Abstract
Aspects of the present invention are directed generally toward atom probe and three-dimensional atom probe microscopes. For example, certain aspects of the invention are directed -toward an atom probe or a three-dimensional atom probe that includes a sub-nanosecond laser to evaporate ions from a specimen under analysis and a reflectron for reflecting the ions. In further aspects of the invention, the reflectron can include a front electrode and a back electrode. At least one of the front and back electrodes can be capable of generating a curved electric field. Additionally, the front electrode and back electrodes can be configured to perform time focusing and resolve an image of a specimen.
Claims25
An atom probe including:
- a. a laser to at least aid in evaporating ions from a specimen under analysis;
- b. a reflectron for reflecting the ions, wherein the reflectron includes:
- (1) a front electrode;
- and
- (2) a back electrode;
- wherein:
- I. at least one of the front and back electrodes is configured to generate a curved electric field along a flight path of the ions;
- and
- II. the front and back electrodes are configured to perform time focusing and resolve an image of the specimen.
An atom probe including:
- a. a laser configured to illuminate a specimen under analysis;
- b. a reflectron situated to receive evaporated ions traveling along an ion flight path from the specimen, wherein the reflectron includes:
- (1) a front electrode situated along the ion flight path, and
- (2) a back electrode spaced from the front electrode,
- wherein the reflectron is configured to:
- I. generate a curved electric field intersecting the ion flight path,
- II. perform time focusing, and
- III. resolve an image of a specimen.
An atom probe including:
- a. a laser configured to stimulate ion evaporation from a specimen under analysis;
- b. a reflectron situated to receive evaporated ions traveling along an ion flight path, wherein the reflectron includes at least two electrodes arrayed in a direction along the ion flight path, wherein the electrodes are configured to:
- (1) generate a curved electric field intersecting the ion flight path,
- (2) perform time focusing of the evaporated ions, and
- (3) resolve an image of the specimen from the evaporated ions.
Dependencies are inferred from the claim text.