Polishing arrangement and method of polishing a workpiece surface
AssigneeStrecon A/S
InventorsKim Lorenzen, Jens Groenbaek
Life of this patent
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Abstract
The invention concerns a polishing arrangement (1) with a tool holder (3), at which a polishing tool is arranged and that interacts with a workpiece holder (5), the workpiece holder (5) and the tool holder (3) being movable in relation to one another in a first direction and in a second direction differing from the first direction. It is endeavored to make at least a part of the polishing process reproducible and documentable. For this purpose, in a third direction (20) that is perpendicular to the first (9) and second (10, 12) directions, the tool holder (3) is made to be flexible.
Claims17
A polishing arrangement with a tool holder, at which a polishing tool is arranged and that interacts with a workpiece holder, in which is held a workpiece with a workpiece surface to be polished, the workpiece holder and the tool holder being movable in relation to one another in a first direction and in a second direction differing from the first direction, wherein, in a third direction that is perpendicular to the first and second directions and perpendicular to the workpiece surface, the tool holder is made to be flexible and has its smallest rigidity in the third direction;
- wherein a contact pressure of the polishing tool on the workpiece is controllable, in particular in dependence of the position of the polishing tool on the workpiece;
- and
- wherein the polishing arrangement comprises a contact pressure arrangement operated by a pressure fluid, in particular pressure air, said contact pressure arrangement influencing the contact pressure.
Dependencies are inferred from the claim text.