Substrate processing apparatus

A substrate processing apparatus comprising:

• a storage section for storing a command for performing a specified function in the substrate processing apparatus and an operating authority of a user corresponding to the command and the user's information for previously setting a group to which the user belongs according to an ID of the user and a password of the user;
• and
• a display section for displaying an authority setting screen for setting the operating authority of the user corresponding to the command and a function screen for performing a command stored in the storage section on the basis of the operating authority set via the authority setting screen, wherein
• the authority setting screen includes a group selection section for selecting an object group's name, a file list display section for displaying plural recipes, and an authority input section for muffing the operating authority of a group corresponding to each of the plural recipes,
• the display section displays the authority setting screen so that the operating authorities of the user are set different respectively by the user's information when an operating condition of the substrate processing apparatus is online or when an operating condition of the substrate processing apparatus is offline, and
• the function screen is not displayed, such that the command cannot be executed when the operating condition of the substrate processing apparatus is online even if the user has the operating authorities to perform the command on the function screen.

A non-transitory computer-readable medium storing a control program which, when executed by a hardware processor, causes a computer to function as a device comprising:

• means for storing various files including a plurality of recipes describing a procedure for processing a substrate and operating authorities of a user corresponding to the plurality of recipes and the user's information, for previously setting a group to which the user belongs according to an ID of the user and a password of the user;
• and
• means for displaying an authority setting screen for setting the operating authorities of the user to the respective recipes and an edition screen for editing the recipes stored in a storage section, wherein
• the authority setting screen includes a group selection section for selecting an object group's name, a file list display section for displaying plural recipes, and an authority input section for inputting the operating authority of a group corresponding to each of the plural recipes,
• the authority setting screen is displayed so that the operating authorities of the user are set different respectively by the user's information when an operating condition of the substrate processing apparatus is online or when an operating condition of the substrate processing apparatus is offline, and
• the edition screen is not displayed, such that a recipe for processing the substrate of the plurality of recipes cannot be edited when the operating condition of the substrate processing apparatus is online even if the user has the operating authorities to edit the recipe on the edition screen.

A non-transitory computer-readable medium storing a control program which, when executed by a hardware processor, causes a computer to function as a device comprising:

• means for storing a command for performing a specified function in the substrate processing apparatus and an operating authority of a user corresponding to the command and the user's information for previously setting a group to which the user belongs according to an ID of the user and a password of the user;
• and
• means for displaying an authority setting screen for setting the operating authority of the user corresponding to the command and a function screen for performing a command stored in a storage section on the basis of the operating authority set via the authority setting screen, wherein
• the authority setting screen includes a group selection section for selecting an object group's name, a file list display section for displaying plural recipes, and an authority input section for inputting the operating authority of a group corresponding to each of the plural recipes,
• the authority setting screen is displayed so that the operating authorities of the user are set different respectively by the user's information when an operating condition of the substrate processing apparatus is online or when an operating condition of the substrate processing apparatus is offline, and
• the function screen is not displayed, such that the command cannot be executed when the operating condition of the substrate processing apparatus is online even if the user has the operating authorities to perform the command on the function screen.