A method for fine positioning of a tool during machining of an object, in which the tool or the object is guided by a handling apparatus having multiple movement axes for a coarse positioning of the tool or the object, wherein the multiple movement axes form a kinematic chain, the handling apparatus further having an actuator situated between a terminal link of the kinematic chain and the tool or the object, wherein the actuator has a higher positioning precision than the other movement axes in at least one dimension or axis, the method comprising:
- detecting a relative velocity and a relative direction of movement between the object and the tool or terminal link of the kinematic chain by using at least one sensor, wherein the at least one sensor comprises a camera;
- illuminating a surface of the object in the area of a machining point using optical radiation;
- repeatedly detecting optical radiation reflected from the surface of the object in an area of the machining point using the camera, in order to obtain optical reflection patterns of the surface of the object at different times, wherein the repeated detection occurs at time intervals in which chronologically sequential reflection patterns of overlapping surface areas of the object are obtained;
- ascertaining the relative velocity and the relative direction of movement by comparing the chronologically sequential reflection patterns;
- calculating an actual movement path of the tool, the object, or the terminal link from the relative velocity and relative direction of movement;
- and
- compensating a deviation of the actual movement path from a target movement path, by positioning of the tool or the object using the actuator based on the deviation.