Method and system for systematic defect identification
AssigneeCarnegie Mellon University
InventorsRonald DeShawn Blanton, Wing Chiu Tam
Life of this patent
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Abstract
A method and apparatus for identifying suspect layout features from a plurality of layout features of an integrated circuit (IC) layout. A plurality of snippet images is generated, each of which depicts at least a portion of a suspect layout feature which is different from suspect layout features depicted in others of the plurality of snippet images. The suspect layout features are determined based on the diagnosis of a plurality of defective ICs manufactured in accordance with the IC layout. A plurality of clusters is generated, and each of the clusters contains a group of the plurality of snippet images based on similarities between the snippet images.
Claims20
A method for identifying a suspect layout feature from a plurality of layout features contained in an integrated circuit (IC) layout, comprising:
- generating a plurality of snippet images depicting suspect polygons, each of the snippet images depicting at least a portion of a suspect polygon which is different from a portion of the suspect polygon depicted in others of the plurality of snippet images, the suspect polygons being determined based on the diagnosis of a plurality of defective ICs manufactured according to the IC layout;
- and
- assigning each of the plurality of snippet images to a particular cluster of a plurality of clusters based on similarities between snippet images in each respective cluster.
A method for identifying suspect layout features from a plurality of layout features of an integrated circuit (IC) layout, comprising:
- generating a plurality of snippet images, each of the snippet images depicting at least a portion of a suspect layout feature which is different from suspect layout features depicted in others of the plurality of snippet images, the suspect layout features being determined based on the diagnosis of a plurality of defective ICs manufactured in accordance with the IC layout;
- and
- generating a plurality of clusters, each of the clusters containing a group of the plurality of snippet images based on similarities between the snippet images.
A computing device comprising:
- a communications interface adapted to communicate with a network;
- and
- a control system comprising a processor and coupled to the communications interface, the control system adapted to:
- generate a plurality of snippet images, each of the snippet images depicting at least a portion of a suspect layout feature which is different from suspect layout features depicted in others of the plurality of snippet images, the suspect layout features being determined based on diagnoses of a plurality of defective integrated circuits manufactured in accordance with an integrated circuit (IC) layout;
- and
- generate a plurality of clusters, each of the clusters containing a group of the plurality of snippet images based on similarities between the plurality of snippet images.
Dependencies are inferred from the claim text.