MEMS device
AssigneeFujitsu Limited
InventorsXiaoyu Mi, Osamu Toyoda, Satoshi Ueda
Life of this patent
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Abstract
A MEMS device includes a substrate, a fixed electrode that is provided on the substrate and allows a signal to pass therethrough, a movable electrode that is provided above the substrate in a manner to face the fixed electrode and allows a signal to pass therethrough, a driving line that is provided inside the substrate and used to apply a driving voltage to displace the movable electrode, and a resistance that is provided in a first via hole formed inside the substrate and used to cutoff a signal. The fixed electrode or the movable electrode is connected to the driving line through the first resistance.
Claims4
A MEMS device comprising:
- a substrate;
- a fixed electrode that is disposed on the substrate, and allows signal to pass therethrough;
- a movable electrode that is disposed above the substrate in a manner to face the fixed electrode, and allows signal to pass therethrough;
- a driving line that is disposed inside the substrate and is connected to apply a driving voltage to displace the movable electrode;
- a first resistance that is disposed in a first via hole formed inside the substrate and is usable to cut off a signal;
- and
- a driving electrode that is disposed on the substrate facing the movable electrode and is connected to the driving line through the first resistance;
- wherein the fixed electrode includes a first fixed electrode and a second fixed electrode,
- the first fixed electrode and the second fixed electrode include a plurality of comb-tooth portions individually, and
- the plurality of comb-tooth portions of the first fixed electrode and the plurality of comb-tooth portions of the second fixed electrode are arranged alternately next to each other.
Dependencies are inferred from the claim text.