US 8,508,886 B2 · Use of magnetic material for RIE stop layer during damascene main pole formation

Abstract

A write head for use in a magnetic disk drive and methods of manufacturing the same. When a non-magnetic reactive ion etching (RIE) stop layer is used in a damascene main pole fabrication process, the leading edge shield and the side shield have a magnetic separation. By replacing a non-magnetic RIE stop layer with a magnetic RIE stop layer, no removal of the RIE stop layer around the main pole is necessary. Additionally, the leading edge shield and the side shield will magnetically join together without extra processing as there will be no magnetic separation between the leading edge shield and the side shield.

Claims20

Dependent claims

A write head, comprising:

a leading edge shield;
a magnetic reactive ion etching stop layer disposed on the leading edge shield;
a side shield disposed on the magnetic reactive ion etching stop layer;
a side gap layer disposed on the magnetic reactive ion etching stop layer;
and
a magnetic layer disposed on the side gap layer.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application

13/247,883Filed 28 Sep 2011

Published

US 2013/0078483 A128 Mar 2013

Granted

13 Aug 2013

Term ends

Not estimatedThe source records don’t support an estimate.

Classification6 codes

G11B 5/3116
Details: shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect,…
G11B 5/315
Magnetic layers: shield layers on both sides of the main pole, e.g. in perpendicular magnetic heads
Y10T 428/11
Stock material or miscellaneous articles: magnetic recording head
Y10T 428/1171
Magnetic recording head: with defined laminate structural detail

Use of magnetic material for RIE stop layer during damascene main pole formation

Life of this patent

Use of magnetic material for RIE stop layer during damascene main pole formation

Life of this patent

Abstract

Claims20