Supporting device, optical apparatus, exposure apparatus, and device manufacturing method

A supporting device that supports an optical element, the device comprising:

• a first supporting member that is fixed to a first portion of an outer circumference of the optical element;
• a plurality of members that is connected to a second portion of an outer circumference of the first supporting member;
• and
• a second supporting member that supports the first supporting member via the plurality of members,
• wherein each of the plurality of members is disposed between the first supporting member and the second supporting member in a first direction orthogonal to an optical axis of the optical element, and is configured such that a rigidity thereof in a second direction inclined relative to the first direction in a plane including the optical axis is lower than a rigidity thereof in each of two directions that are orthogonal to the second direction and that are orthogonal to each other so that a stress of the optical element in the first direction is within a tolerance and a displacement of a center of gravity of the optical element in a direction of the optical axis, due to a change in a dimension of at least one of the optical element and the first supporting member and a distance between the first portion and the second portion in the direction of the optical axis, is adjusted via a deformation of each of the plurality of members in the second direction.