Vibration-actuated micro mirror device

A vibration-actuated micro mirror device, comprising:

• a substrate having a first accommodating space;
• a swinging frame, disposed within the first accommodating space and rotatably coupled to a first peripheral side wall defined the first accommodating space through a first shaft about a first axis, the swinging frame further comprising a second accommodating space;
• a reflection mirror, disposed within the second accommodating space and rotatably coupled to a second peripheral side wall defined the second accommodating space through a second shaft about a second axis perpendicular to the first axis;
• and
• a vibration part further comprising:
• a plate having a first surface coupled to the substrate, and a second surface opposite to the first surface;
• and
• a first and a second vibration structures respectively coupled to the second surface and spaced a distance away from each other, wherein at least a part of the first and second vibration structures are corresponding to the substrate;
• wherein the first vibration structure receives a first driving signal having a first frequency and the second vibration structure receives a second driving signal having a second frequency smaller than the first frequency, thereby enabling the swinging frame to rotate about the first axis through twist of the first shaft while enabling the reflection mirror to rotate about the second axis through twist of the second shaft.