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US 8,508,826 B2Granted
Meandering oscillator, optical reflecting element using meandering oscillator, and image projection device using meandering oscillator
AssigneePanasonic Corporation
InventorsJirou Terada, Shinsuke Nakazono, Shigeo Furukawa, Kazuki Komaki
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Abstract
A meandering oscillator includes a plurality of oscillating plates bent and coupled in predetermined directions and piezoelectric actuators each including a lower electrode, a piezoelectric body, and an upper electrode stacked on the oscillating plate in this order, and wherein the piezoelectric actuators are alternately arranged on the oscillating plates. Thus, even when an element is made smaller, electrodes can be easily arranged. As a result, the productivity can be improved.
Claims13
A meandering oscillator, comprising:
- a plurality of oscillating plates bent and coupled in predetermined directions;
- and
- piezoelectric actuators arranged on alternate oscillating plates without being arranged on others of the oscillating plates, wherein
- each of the piezoelectric actuators includes a lower electrode, a piezoelectric body, and an upper electrode stacked on the corresponding oscillating plates in this order, and
- the plurality of oscillating plates are parallel to each other relative to a rotational axis of the meandering oscillator and extend perpendicular to the rotational axis.
2 more elements
A meandering oscillator comprising:
- a first oscillating plate;
- a second oscillating plate coupled with the first oscillating plate;
- and
- a piezoelectric actuator being arranged on the first oscillating plate and the piezoelectric actuator not being arranged on the second oscillating plate,
- wherein the piezoelectric actuator includes a lower electrode, a piezoelectric body, and an upper electrode stacked on the first oscillating plate in this order, and
- wherein the first oscillating plate and the second oscillating plate are parallel to each other relative to a rotational axis of the meandering oscillator and extend perpendicular to the rotational axis.
3 more elements
Dependencies are inferred from the claim text.