On-chip variable delay transmission line with fixed characteristic impedance
AssigneeInternational Business Machines Corporation
InventorsHanyi Ding, Wayne H. Woods, Jr.
Life of this patent
Estimating the term…
Abstract
A design structure, structure, and method for providing an on-chip variable delay transmission line with a fixed characteristic impedance. A method of manufacturing a transmission line structure includes forming a signal line of the transmission line structure, forming a first ground return structure that causes a first delay and a first characteristic impedance in the transmission line structure, and forming a second ground return structure that causes a second delay and a second characteristic impedance in the transmission line structure. The first delay is different from the second delay, and the first characteristic impedance is substantially the same as the second characteristic impedance.
Claims16
A semiconductor structure, comprising:
- a signal line,
- a first ground return rail and a first capacitance structure;
- and
- a second ground return rail and a second capacitance structure;
- wherein the first capacitance structure is closer to the signal line than the second capacitance structure;
- grounding for the signal line may be selectively switched between the first ground return rail and the second ground return rail;
- the signal line, the first ground return rail, and the second ground return rail are formed in different wiring levels above a substrate;
- and
- the first capacitance structure includes capacitance elements in a same one of said wiring levels as the signal line.
A semiconductor structure, comprising:
- a signal line, wiring levels,
- a first ground return structure comprising a first ground return rail connected to first capacitance elements by first capacitance combs;
- and
- a second ground return structure comprising a second ground return rail connected to second capacitance elements by second capacitance combs;
- wherein the signal line, the first capacitance elements, and the second capacitance elements are in a same one of said wiring levels;
- and
- the signal line, the first ground return rail, and the second ground return rail are in different ones of said wiring levels.
Dependencies are inferred from the claim text.