Surface acoustic wave element, surface acoustic wave device and methods for manufacturing the same

A surface acoustic wave device, comprising:

• a surface acoustic wave element including a first pad portion;
• a first substrate including a second pad portion;
• a connecting portion which electrically connects the first pad portion and the second pad portion;
• and
• an oxide film which is disposed on the first pad portion, the second pad portion and the connecting portion;
• the surface acoustic wave element further comprises:
• a second substrate comprising a piezoelectric material;
• a plurality of first electrodes which are disposed on the second substrate and are separated from each other;
• a plurality of second electrodes which are disposed on the second substrate and are separated from the first electrodes and are separated from each other;
• and
• oxide films which are disposed on the respective plurality of first electrodes and plurality of second electrodes,
• wherein the first pad portion is constructed integrally with the plurality of first electrodes and the plurality of second electrodes.

A surface acoustic wave element for analyzing a biological material, comprising:

• a first substrate comprising a piezoelectric material including a pad portion;
• a second substrate including another pad portion;
• a connecting portion which electrically connects respective pad portions on the first and second substrates;
• at least one electrode disposed on the first substrate having an oxide film formed on the at least one electrode;
• and
• at least one receptor disposed on the substrate on a portion of the first substrate,
• wherein the at least one receptor is constructed to react with a target material,
• wherein the target material is included in a conductive sample,
• wherein the oxide film is adapted to prevent a current leakage through the conductive sample,
• wherein the at least one electrode is constructed integrally with a respective pad portion, and
• wherein the oxide film is disposed on the at least one electrode excluding an area of the pad portion.

A surface acoustic wave device comprising,

• a first substrate comprising a piezoelectric material including a pad portion;
• a second substrate including another pad portion;
• at least one connecting portion which electrically connects respective pad portions on the first and second substrates;
• at least one interdigital transducer electrode disposed on the first substrate;
• and
• at least one receptor disposed directly on the first substrate on an exposed portion of the substrate,
• wherein a target material in a liquid sample binds to the receptor,
• wherein a difference between input and output signals generated from at least one interdigital transducer electrode upon the binding of target material with the receptors indicates the presence, amount or concentration of the target material;
• wherein an oxide film is formed on each of the interdigital transducer electrode by oxidation;
• wherein the at least one interdigital transducer electrode is constructed integrally with a respective pad portion;
• and
• wherein the oxide film is formed on the interdigital transducer electrode excluding an area of the pad portion.

A surface acoustic wave element, comprising:

• a first substrate comprising a piezoelectric material including a pad portion;
• a second substrate including another pad portion;
• at least one connecting portion which electrically connects respective pad portions on the first and second substrates;
• a plurality of first surface-oxidizable electrodes which are disposed on the first substrate;
• a plurality of second surface-oxidizable electrodes which are disposed on the first substrate and are separated from the first surface-oxidizable electrodes;
• a first oxide film which is formed directly on the plurality of first surface-oxidizable electrodes by oxidation of the plurality of first surface-oxidizable electrodes;
• a second oxide film which is formed directly on the plurality of second surface-oxidizable electrodes by oxidation of the plurality of second surface-oxidizable electrodes;
• and
• at least one receptor disposed on the first substrate on a portion of the first substrate between the plurality of first surface-oxidizable electrodes and the plurality of second surface-oxidizable electrodes,
• wherein the plurality of first and second surface-oxidizable electrodes are constructed integrally with a respective pad portion, and
• wherein the first and second oxide films are disposed on the plurality of first and second surface-oxidizable electrodes excluding an area of the pad portion.