Package manufacturing method, package, piezoelectric vibrator, oscillator, electronic device and radio timepiece
AssigneeSeiko Instruments Inc.
InventorKazuyoshi Sugama
Life of this patent
Estimating the term…
Abstract
A package and method for manufacturing the package using a rivet having a head portion and a core portion protruding from a rear surface of the head portion. The package includes a plurality of substrates bonded to each other and a cavity that houses an object in a sealed state. The core portion is disposed in a through hole in a base substrate and electrically connects the object with the outside. The core portion is inserted into the through hole and a glass frit is formed between the through hole and the core portion and seals the rivet in the through hole. A gas relief passage is formed leading from a base end of the core portion to a surface of the head portion.
Claims10
A package manufacturing method for manufacturing a package using a rivet having a flat plate-shaped head portion and a core portion protruding from a rear surface of the head portion, the package including
- a plurality of substrates in which adjacent substrates are bonded to each other in a laminated state,
- a cavity which is formed by being sandwiched by a pair of substrates of the plurality of substrates, and which houses an object to be housed in an airtightly sealed state,
- the core portion which is disposed in a through hole that penetrates a base substrate that is one of the pair of substrates, and which electrically connects the object to be housed with the outside, and
- a glass frit that is filled between the through hole and the core portion and is fired to form a seal between the through hole and the core portion, the package manufacturing method comprising:
- a rivet disposing step of inserting the core portion into the through hole until the rear surface of the head portion comes into contact with a first surface of the base substrate, and disposing the rivet in the base substrate;
- a glass frit filling step of filling the glass frit in a paste form between the through hole and the core portion, in the base substrate in which the rivet is disposed;
- and
- a firing step of integrally fixing the through hole, the rivet and the glass frit by firing the filled glass frit, and sealing between the through hole and the core portion;
- wherein
- a gas relief passage, which leads from a base end of the core portion to one of a side surface and a front surface of the head portion, is formed on the rear surface of the head portion of the rivet.
A package comprising:
- a plurality of substrates in which adjacent substrates are bonded to each other in a laminated state;
- a cavity which is formed by being sandwiched by a pair of substrates of the plurality of substrates, and which houses an object to be housed in an airtightly sealed state;
- a core portion which is disposed in a through hole that penetrates a base substrate that is one of the pair of substrates, and which electrically connects the object to be housed with the outside;
- a flat plate portion that is connected to the core portion and is disposed in the cavity;
- and
- a glass frit that is filled between the through hole and the core portion and is fired to form a seal between the through hole and the core portion;
- wherein
- the flat plate portion is disposed in the cavity so as to cover the through hole, and
- the glass frit is exposed in the cavity.
Dependencies are inferred from the claim text.