Test device and semiconductor integrated circuit device
AssigneeSamsung Electronics Co., Ltd.
InventorsSang-Jin Lee, Gin-Kyu Lee
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AssigneeSamsung Electronics Co., Ltd.
InventorsSang-Jin Lee, Gin-Kyu Lee
Estimating the term…
Test devices and integrated circuits with improved productivity are provided. In accordance with example embodiments, a test device may include a first test region with a first test element and a second test region with a second test element defined on a semiconductor substrate. The first test element may include a pair of first secondary test regions in the semiconductor substrate and a pair of first test gate lines. One of the first test gate lines may overlap one of the first secondary test regions and the other first test gate line may overlap the other first secondary test region. The second test element may include structures corresponding to the first test element except the second test element does not include structures corresponding to the pair of first secondary test regions and the pair of first test gate lines.
A semiconductor integrated circuit device comprising:
Dependencies are inferred from the claim text.