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US 8,508,008 B2Granted
Optical signal transfer in a semiconductor device by using monolithic opto-electronic components
AssigneeGlobalfoundries Inc.
InventorsUwe Griebenow, Sven Beyer, Thilo Sheiper, Jan Hoentschel
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Abstract
In a semiconductor device, optical signal transfer capabilities are implemented on the basis of silicon-based monolithic opto-electronic components in combination with an appropriate waveguide. Thus, in complex circuitries, such as microprocessors and the like, superior performance may be obtained in terms of signal propagation delay, while at the same time thermal requirements may be less critical.
Claims17
A semiconductor device, comprising:
- a first circuit element formed in and above a first silicon-containing semiconductor layer;
- a second circuit element formed in and above said first silicon-containing semiconductor layer;
- a second silicon-containing semiconductor layer positioned below said first silicon containing semiconductor layer;
- a first vertical cladding material layer comprised of a dielectric material positioned above and on said second silicon-containing semiconductor layer;
- a second vertical cladding material layer comprised of a dielectric material positioned below and on said second silicon-containing semiconductor layer;
- a first lateral cladding material layer that is positioned in at least said second silicon-containing semiconductor layer, wherein said first and second vertical cladding materials and said first lateral cladding material define an optical waveguide structure comprised of a portion of said second silicon-containing semiconductor layer, a lateral dimension of said optical waveguide structure being defined by said first lateral cladding material layer;
- a light-emitting element formed in said optical waveguide structure;
- a light-receiving element formed in said optical waveguide structure, said light-receiving element being configured and arranged to receive light from said light-emitting element traveling within said optical waveguide structure;
- and
- an interconnect structure configured to electrically connect said light-emitting element with said first circuit element and to electrically connect said light-receiving element with said second circuit element.
7 more elements
A semiconductor device, comprising:
- a plurality of circuit elements formed in and above a first silicon-containing semiconductor layer;
- a light-emitting element formed in a second silicon-containing semiconductor layer, said first silicon-containing semiconductor layer being formed above said second silicon-containing semiconductor layer;
- a light-receiving element formed in said second silicon-containing semiconductor layer;
- a first buried cladding layer formed between said first and second silicon-containing semiconductor layers;
- a second buried cladding layer formed below said second silicon-containing semiconductor layer;
- and
- an interconnect system configured to electrically connect said light-emitting element and said light-receiving element to said plurality of circuit elements.
4 more elements
A semiconductor device, comprising:
- a plurality of circuit elements formed in and above a first silicon-containing semiconductor layer;
- a second silicon-containing semiconductor layer positioned below said first silicon-containing semiconductor layer;
- an enclosed optical waveguide structure defined in a portion of said second silicon-containing structure, said enclosed optical waveguide structure being defined by:
- a first buried cladding layer formed between said first and second silicon-containing semiconductor layers;
- a second buried cladding layer formed below said second silicon-containing semiconductor layer;
- and
- a third cladding layer that is positioned at least in said second silicon-containing semiconductor layer;
- a light-emitting element positioned in said enclosed optical waveguide structure;
- a light-receiving element positioned in said enclosed optical waveguide structure;
- and
- an interconnect system configured to electrically connect said light-emitting element and said light-receiving element to said plurality of circuit elements.
8 more elements
A method of forming a silicon-based semiconductor device in a structure comprised of a first silicon-containing semiconductor layer positioned between first and second layers of dielectric material, said first layer of dielectric material being positioned below said first silicon-containing semiconductor layer, and a second silicon-containing semiconductor layer positioned on an upper surface of said second layer of dielectric material, the method comprising:
- forming cladding material opening that extends at least through said first and second silicon-containing semiconductor layers and said second layer of dielectric material;
- filling said cladding material opening with a dielectric cladding material so as to define a lateral width of an optical waveguide structure comprised of a portion of said first silicon-containing semiconductor layer;
- forming a light-emitting element and a light-receiving element in said optical waveguide structure, wherein said light-receiving element is adapted to receive light from said light-emitting element traveling within said optical waveguide structure;
- and
- forming first and second circuit elements in and above said second silicon-containing semiconductor layer;
- and
- forming an interconnect structure configured to electrically connect said light-emitting element with said first circuit element and to electrically connect said light-receiving element with said second circuit element.
4 more elements
Dependencies are inferred from the claim text.