Semiconductor device, method of fabricating the same, and semiconductor module and electronic system including the semiconductor device

A semiconductor device, comprising:

• a substrate including a cell area and a peripheral area, the cell area having a plurality of cell active regions defined by cell isolation regions, and the peripheral area having a peripheral active region defined by a peripheral isolation region;
• a bit line structure in the cell area of the substrate;
• a peripheral gate structure in the peripheral area of the substrate;
• first bit line offset spacers on at least two sides of the bit line structure;
• first peripheral gate offset spacers on at least two sides of the peripheral gate structure;
• second peripheral gate offset spacers on the at least two sides of the peripheral gate structure;
• and
• peripheral gate spacers on the at least two sides of the peripheral gate structure.

A semiconductor device, comprising:

• a substrate including a cell area and a peripheral area;
• a bit line structure in the cell area, the bit line structure including first external sidewalls;
• a bit line spacer on the first external sidewalls;
• a peripheral gate structure in the peripheral area, the peripheral gate structure including second external sidewalls;
• and
• a peripheral spacer on the second external sidewalls, the peripheral spacer being thicker than the bit line spacer, and the peripheral spacer including more spacer layers than the bit line spacer.