Method of fabricating semiconductor device having storage capacitor and higher voltage resistance capacitor and semiconductor device fabricated using the same

A semiconductor device comprising:

• a substrate having a storage capacitor region, a lower voltage region, a higher voltage region and a higher voltage resistance capacitor region, the lower voltage region and the higher voltage region between the storage capacitor region and the higher voltage resistance capacitor region;
• lower electrodes on the storage capacitor region and the higher voltage resistance capacitor region;
• a first dielectric film on the lower electrode of the higher voltage resistance capacitor region;
• a second dielectric film on the lower electrode of the storage capacitor region and the first dielectric film;
• upper electrodes on the second dielectric film to respectively correspond to the lower electrodes;
• and
• a lower voltage gate electrode and a higher voltage gate electrode in the lower voltage region and the higher voltage region, respectively, the lower voltage gate electrode and the higher gate electrode composed of the same material as the upper electrodes.