Semiconductor device with high density optical chips and manufacturing method thereof
AssigneeKabushiki Kaisha Toshiba
InventorsAtsuko Iida, Iwao Mitsuishi
Life of this patent
Estimating the term…
Loading patent…
AssigneeKabushiki Kaisha Toshiba
InventorsAtsuko Iida, Iwao Mitsuishi
Estimating the term…
An aspect of the present invention provides a semiconductor device, in which densely packaging and high performance of optical elements are realized by a simple manufacturing process. The semiconductor device includes: a first chip module, a second chip module and a bonding layer. The first chip module includes a plurality of optical chips that are bonded within a substantially same plane with a first resin layer. The second chip module includes a plurality of control semiconductor chips and a plurality of connecting chips. The connecting chips include conductive materials piercing through the connecting chips. The control semiconductor chips and the connecting chips are bonded within a substantially same plane with a second resin layer. And the optical chips and the control semiconductor chips are electrically connected through the connecting chips.
A semiconductor device comprising:
Dependencies are inferred from the claim text.