Probe and probe card

A probe for contacting input/output terminals of a device under test for establishing an electrical connection between the device under test and a test system when testing the device under test, the probe comprising:

• conductive parts to be electrically connected with the input/output terminals of the device under test;
• a plurality of beam parts, each beam part having a one side main surface on which each conductive part is provided;
• and
• a base part supporting the plurality of beam parts all together in a cantilever fashion, wherein
• the conductive part includes:
• an interconnect part provided on the one side main surface of the beam part along a longitudinal direction of the beam part;
• and
• a contact part provided at a front end of the interconnect part so as to project upright from the interconnect part,
• the plurality of beam parts are supported by the base part at a rear region of the plurality of beam parts,
• a plurality of slots penetrate between adjoining beam parts in a front region of the plurality of beam parts,
• a plurality of grooves are provided between adjoining beam parts in the rear region and are connected with the plurality of slots,
• each groove opens toward the slot at a front end side
• each groove has a bottom surface, side walls, and a terminating end wall between a frontmost end and a rearmost end in the rear region, and
• each groove is defined by its respective front end side, bottom surface, side walls and terminating end wall so as to terminate before the rearmost end of the rear region.