Method and system for determining depth profiling
AssigneeYeda Research and Development Co. Ltd.
InventorHagai Cohen
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Abstract
The present invention relates to a novel system and method for the determination of depth profiling with improved accuracy and reliability. The method comprises obtaining spectroscopic data from the sample while under at least two different electrical conditions of the sample, the spectroscopic data comprising a signal of charged particles emitted from the sample, and being indicative of a change in amplitude, spectral position and spectral shape of the signal from the sample while under different electrical conditions of the sample, the change being indicative of the compositional profile and spatial distribution for at least one chemical element in the sample along a direction through the sample.
Claims14
A method for examining a sample, the method comprising:
- obtaining spectroscopic data from the sample having multiple materials while under at least two different electrical conditions of the sample, said spectroscopic data comprising a first spectroscopic data being quantified-type data indicative of an amplitude change of a photoelectron signal from the sample with a change in the electrical condition of the sample and being thus indicative of a material compositional profile of the sample along a direction perpendicular to a surface of the sample;
- and second spectroscopic data being indicative of change in spectral line shifts and shape distortion with a change in the electrical condition of the sample and thus indicative of spatial distribution of chemical elements in the sample along said direction;
- combining the results of the two spectroscopic data;
- and generating measured data of the compositional profile and spatial distribution being indicative of inhomogeneity of the compositional profile and spatial distribution for at least one chemical element in the sample along said direction.
Dependencies are inferred from the claim text.