Microengineered multipole ion guide

A microengineered mass spectrometer system comprising an ion guide chamber comprising a plurality of rods defining an ion guide, a first set of rods being supported on a first substrate, a second set of rods being supported on a second substrate, and a third set of rods provided on a third substrate and wherein each of the first, second and third substrates are arranged relative to one another to define an ion beam axis therebetween, the first, second, and third substrates being coupled together by contact of an arcuate surface through a line or point contact with a flat surface, v-groove, surfaces defining an aperture, or a cone in a manner characteristic of a kinematic or quasi-kinematic coupling;

• and
• an analyser chamber comprising a microengineered mass analyser, wherein the ion guide is operable for directing ions towards the analyser chamber, and the supported rods are circumferentially arranged about the ion beam axis without passing through the substrates.