Liquid composition containing aminoether for deposition of metal-containing films

A formulation, comprising:

• a) at least one metal-ligand complex, wherein one or more ligands are selected from the group consisting of, β-diketonate, β-ketoiminate, β-ketoesterate, β-diiminate, alkyl, carbonyl, alkyl carbonyl, cyclopentadienyl, pyrrolyl, alkoxide, amidinate, imidazolyl, and mixtures thereof;
• and the metal is selected from Group 2 to 16 elements of the Periodic Table of the Elements;
• and,
• b) at least one aminoether solvent selected from the group consisting of R1R2NR3OR4NR5R6, R1OR4NR5R6, O(CH2C2)2NR1, R1R2NR3N(CH2CH2)2O, R1R2NR3OR4N(CH2CH2)2O, O(CH2CH2)2NR3OR4N(CH2CH2)2O, and mixtures thereof, wherein R1-2 and R5-6 are independently selected from group consisting of C1-10 linear alkyl, C1-10 branched alkyl, C1-10 cyclic alkyl, C6-C10 aromatic, C1-10 alkylamine, C1-10 alkylaminoalkyl, C1-10 ether, C4-C10 cyclic ether, C4-C10 cyclic aminoether, and mixture thereof;
• and R3-4 are independently selected from group consisting of C1-10 linear alkylene, C1-10 branched alkylene, C1-10 cyclic alkylene, C6-C10 aromatic, C1-10 alkylamine, C1-10 alkylaminoalkyl, C1-10 ether, C4-C10 cyclic ether, C4-C10 cyclic aminoether, and mixture thereof.