Template derivative for forming ultra-low dielectric layer and method of forming ultra-low dielectric layer using the same
AssigneeHynix Semiconductor Inc.
InventorsSung Kyu Min, Ja Chun Ku, Sang Tae Ahn, Chai O Chung, Hyeon Ju An, Hyo Seok Lee, Eun Jeong Kim, Chan Bae Kim
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Abstract
A reactive cyclodextrin derivative or a reactive glucose derivative is used as a template derivative for forming an ultra-low dielectric layer. A layer is formed of the reactive cyclodextrin derivative or the reactive glucose derivative capped with Si—H and then cured in an atmosphere of hydrogen peroxide to form the ultra-low dielectric layer.
Claims10
A template derivative for forming an ultra-low dielectric layer, composed of a glucose derivative represented by the following formula:
- wherein, in the formula, R represents (CH2)n—SiH3 and n represents an integer of 1 to 3.
A method of forming an ultra-low dielectric layer using a template derivative, comprising the steps of:
- forming a layer using a glucose derivative represented by the following formula:
- wherein, in the formula, R represents (CH2)n—SiH3 and n represents an integer of 1 to 3;
- and
- curing the layer in an atmosphere of hydrogen peroxide.
Dependencies are inferred from the claim text.