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US 8,507,575 B2Granted
Radiation-sensitive resin composition, polymer, and compound
AssigneeJsr Corporation
InventorsNobuji Matsumura, Yukio Nishimura, Akimasa Soyano, Ryuichi Serizawa, Noboru Otsuka, Hiroshi Tomioka
Life of this patent
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Abstract
A radiation-sensitive resin composition includes a first polymer including a repeating unit represented by a following formula (I). X+ is an onium cation. X+ in the formula (I) is preferably an onium cation represented by a following formula (1-1), an onium cation represented by a following formula (1-2) or a combination thereof.
Claims22
A radiation-sensitive resin composition comprising:
- a first polymer including a repeating unit represented by a formula (I);
- and
- an acid generating component including a second polymer which includes a repeating unit represented by a formula (3), a radiation-sensitive acid generator other than the first polymer or the second polymer, or both thereof, the acid generating component generating an acid upon irradiation with actinic radiation or a radioactive ray, the first polymer serving as a base with respect to the acid where the radiation-sensitive resin composition is not irradiated with the actinic radiation or the radioactive ray,
- wherein
- R1 represents a hydrogen atom, a methyl group or a trifluoromethyl group,
- R2 represents a single bond, a linear or branched bivalent hydrocarbon group having 1 to 10 carbon atoms, a bivalent hydrocarbon group having 3 to 20 carbon atoms which has a cyclic structure formed by a part or all of the carbon atoms, or a group derived therefrom by substituting a part or all of hydrogen atoms with a fluorine atom,
- R3 represents a single bond, a —O— group, a —C(═O)— group, a —O—C(═O)— group, a —C(═O)—O— group or a sulfinyl group,
- R4 represents a single bond, a linear or branched bivalent hydrocarbon group having 1 to 10 carbon atoms, or a bivalent hydrocarbon group having 3 to 20 carbon atoms which has a cyclic structure formed by a part or all of the carbon atoms,
- A−represents —N−—SO2—RD, —COO−, —O−or —SO3−, wherein RD represents a linear or branched monovalent hydrocarbon group having 1 to 10 carbon atoms, a monovalent hydrocarbon group having 3 to 20 carbon atoms which has a cyclic structure formed by a part or all of the carbon atoms, or a group derived therefrom by substituting a part or all of hydrogen atoms with a fluorine atom,
- X+represents an onium cation, and
- “a” is 0 or 1, wherein an end of R4 at SO3−side is other than —CF2—when A−is —SO3−, each of R2, R3 and R4 is not a single bond at a same time when A−is —COO−, and A−is other than —O—when “a” is 1,
- wherein, each of R1, R2 and X+is respectively as defined in the formula (I), and n is an integer of 1 to 4,
- wherein the first polymer, the second polymer, or both thereof further includes a repeating unit represented by a formula (2),
- wherein
- R1 is as defined in the formula (I),
- R10 represents a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, and each R11 independently represents an alkyl group having 1 to 4 carbon atoms or a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, or
- R10 represents an alkyl group having 1 to 4 carbon atoms or a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, and two R11 groups bond to each other to form a bivalent alicyclic hydrocarbon group having 4 to 20 carbon atoms together with the carbon atom to which the two R11 groups are bound.
14 more elements
A radiation-sensitive resin composition comprising:
- a first polymer including a repeating unit represented by a formula (1);
- and
- an acid generating component including
- a second polymer which includes a repeating unit represented by a formula (3),
- a radiation-sensitive acid generator other than the first polymer or the second polymer, or
- both thereof,
- wherein
- R1 represents a hydrogen atom, a methyl group or a trifluoromethyl group,
- R2 represents a linear or branched bivalent hydrocarbon group having 1 to 10 carbon atoms, a bivalent hydrocarbon group having 3 to 20 carbon atoms which has a cyclic structure formed by a part or all of the carbon atoms, or a group derived therefrom by substituting a part or all of hydrogen atoms with a fluorine atom,
- R3 represents a single bond, a —C(═O)— group, a —O—C(═O)— group or a sulfinyl group,
- RD represents a linear or branched monovalent hydrocarbon group having 1 to 10 carbon atoms, a monovalent hydrocarbon group having 3 to 20 carbon atoms which has a cyclic structure formed by a part or all of the carbon atoms, or a group derived therefrom by substituting a part or all of hydrogen atoms with a fluorine atom, and
- X+represents an onium cation,
- wherein, each of R1 , R2 and X+is respectively as defined in the formula (1), and n is an integer of 1 to 4.
10 more elements
A polymer comprising:
- a repeating unit represented by a formula (21-1), a repeating unit represented by a formula (21-2), or a combination thereof;
- and
- a repeating unit represented by a following formula (2),
- wherein
- R1 represents a hydrogen atom, a methyl group or a trifluoromethyl group,
- R2 represents a single bond, a linear or branched bivalent hydrocarbon group having 1 to 10 carbon atoms, a bivalent hydrocarbon group having 3 to 20 carbon atoms which has a cyclic structure formed by a part or all of the carbon atoms, or a group derived therefrom by substituting a part or all of hydrogen atoms with a fluorine atom,
- R3 represents a single bond, a —O— group, a —C(═O)— group, a —C(═O)—O— group or a —O—C(═O)— group,
- R4 represents a single bond, a linear or branched bivalent hydrocarbon group having 1 to 10 carbon atoms, or a bivalent hydrocarbon group having 3 to 20 carbon atoms which has a cyclic structure formed by a part or all of the carbon atoms, wherein each of R2, R3 and R4 is not a single bond at a same time, and
- X+represents an onium cation,
- wherein
- R1 is as defined in the formula (21-1),
- R10 represents a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, and each R11 independently represents an alkyl group having 1 to 4 carbon atoms or a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, or
- R10 represents an alkyl group having 1 to 4 carbon atoms or a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, and two R11 groups bond to each other to form a bivalent alicyclic hydrocarbon group having 4 to 20 carbon atoms together with the carbon atom to which the two R11 groups are bound.
10 more elements
A compound represented by a following formula (i),
- wherein
- R1 represents a hydrogen atom, a methyl group or a trifluoromethyl group,
- R2 represents a linear or branched bivalent hydrocarbon group having 1 to 10 carbon atoms, a bivalent hydrocarbon group having 3 to 20 carbon atoms which has a cyclic structure formed by a part or all of the carbon atoms, or a group derived therefrom by substituting a part or all of hydrogen atoms with a fluorine atom,
- R3 represents a single bond, a —C(═O)— group, a —O—C(═O)— group or a sulfinyl group,
- RD represents a linear or branched monovalent hydrocarbon group having 1 to 10 carbon atoms, a monovalent hydrocarbon group having 3 to 20 carbon atoms which has a cyclic structure formed by a part or all of the carbon atoms, or a group derived therefrom by substituting a part or all of hydrogen atoms with a fluorine atom, and
- X+represents an onium cation.
3 more elements
Dependencies are inferred from the claim text.