Systems and methods for delivery of fluid-containing process material combinations
AssigneeForesight Processing, LLC
InventorsJohn E. Q. Hughes, Donald D. Ware, Steven M. Lurcott, Peter Wrschka
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Abstract
Common sources of different (e.g., concentrated) process materials are controllably supplied to multiple blending manifolds associated with multiple process tools, processing stations, or other points of use, to create an independently controllable process material blend for each tool, station, or point of use. Multi-constituent process materials may be circulated from a supply container through a blending manifold to a return container to ensure homogeneity until immediately prior to blending and use. Such containers may include liner-based containers adapted for pressure dispensation.
Claims19
A system adapted for use with at least one manufacturing process tool having a plurality of independently controllable processing stations, the system comprising:
- a first interface to a common source of a first process material configured to provide said first process material for use by said at least one manufacturing process tool, wherein the source of first process material comprises a plurality of first containers adapted to contain said first process material;
- a second interface to a common source of a second process material configured to provide said second process material for use by said at least one manufacturing process tool;
- a plurality of blending manifolds including a dedicated blending manifold for each processing station of the plurality of processing stations;
- for each blending manifold of the plurality of blending manifolds, at least one flow control element adapted to regulate delivery to the blending manifold of any of the first process material and the second process material;
- and
- a first circulation apparatus adapted to circulate at least a portion of said first process material through at least one first circulation flow path between at least two containers of said plurality of first containers;
- wherein the system comprises at least one of the following features (A) and (B):
- (A) the at least one first circulation flow path extends through said plurality of blending manifolds;
- and
- (B) each container of the plurality of first containers comprises:
- (i) a collapsible liner comprising a flexible film material and defining a process material port for ingress or egress of process material relative to the container, (ii) a housing adapted to contain the collapsible liner, said housing defining at least a first orifice adapted to receive the first port, wherein the housing and the liner define a sealable volume therebetween, and wherein the housing is more rigid than the liner;
- and (iii) a fluid feed passage coupleable to at least one pressure source adapted to modify pressure within the sealable volume to promote ingress or egress of process material through the process material port.
Dependencies are inferred from the claim text.