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US 8,507,359 B2Granted
Semiconductor device, process for producing same, and display device
AssigneeSharp Kabushiki Kaisha
InventorKatsuyuki Suga
Life of this patent
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Abstract
A wire (24) and a pixel electrode (25) are formed on a surface of a flat supporting substrate (21) which surface is opposite to a surface on which a TFT (16) is formed. Accordingly, it is possible to provide an active matrix substrate (2) which makes it possible to suppress a decline in yield.
Claims11
A process for producing a semiconductor device,
- comprising the steps of:
- (a) forming a plurality of elements on a first substrate;
- and (b) selectively transferring the plurality of elements formed on the first substrate onto a second substrate via one or more intermediate transfer substrate;
- in the step (a), a connection surface being formed on at least one surface of each of the plurality of elements, the connection surface being a surface in which a terminal of the element that is to be electrically connected to wires of the element is formed, the step (b) further including the step of (c) selectively transferring the plurality of elements from the intermediate transfer substrate onto the second substrate, in the step (c), the plurality of elements, which have been transferred from the first substrate to intermediate transfer substrate, are selectively transferred onto the second substrate by pressing the intermediate transfer substrate and the second substrate onto one another so that the connection surface formed on one surface of an element to be transferred onto the second substrate out of the plurality of elements formed on the intermediate transfer substrate is located between a first surface of the second substrate and a second surface of the second substrate, the first surface of the second substrate being a surface on which the element is to be formed, and the second surface of the second substrate being a surface opposite to the first surface, the process further comprising the steps of:
- (d) forming, in the second substrate, a through-hole for allowing electrical connection between the wires and the connection surface located between the first surface of the second substrate and the second surface of the second substrate;
- and (e) forming the wires on the second surface of the second substrate.
3 more elements
Dependencies are inferred from the claim text.