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US 8,507,317 B2Granted
Solder bump structure for flip chip semiconductor devices and method of manufacturing therefore
AssigneeAgere Systems Inc.
InventorsMark A. Bachman, Donald S. Bitting, Sailesh Chittipeddi, Seung H. Kang, Sailesh M. Merchant
Life of this patent
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Abstract
The invention provides, in one aspect, a semiconductor device that comprises an interconnect layer located over a semiconductor substrate. A passivation layer is located over the interconnect layer and having a solder bump support opening formed therein. Support pillars that comprise a conductive material are located within the solder bump support opening.
Claims7
A method of fabricating a semiconductor device, comprising:
- providing a semiconductor substrate having an interconnect located thereover;
- creating a solder bump support opening in a first passivation layer located over the interconnect;
- depositing a lithographic resist layer in the solder bump support opening and over the passivation layer;
- patterning the lithographic resist layer to form spaced apart sacrificial posts within the solder bump support opening;
- depositing a conductive material between the spaced apart sacrificial posts and within the solder bump support opening;
- removing the lithographic resist layer, thereby leaving the conductive material within the solder bump support opening to form support pillars within the solder bump support opening, wherein removing the lithographic resist layer includes leaving a space between at least one of the support pillars and the sidewall of the solder bump support opening;
- and
- depositing a second passivation layer over the first passivation layer and between the support pillars;
- removing a portion of the second passivation layer from between the support pillars, such that the second passivation layer remains within the space between at least one of the support pillars and the sidewall of the solder bump support opening;
- forming an under bump metallization (UBM) layer over and between the solder bump support pillars.
7 more elements
A method of fabricating a semiconductor device, comprising:
- forming an interconnect layer over a semiconductor substrate;
- forming a passivation layer over the interconnect layer;
- patterning the passivation layer to form a solder bump support opening therein;
- forming support pillars within the solder bump support opening, the support pillars comprising a conductive material;
- and
- forming an under bump metallization (UBM) layer located over the support pillars, wherein the UBM layer is located between at least one of the support pillars and a sidewall of the opening formed in the passivation layer and contacting the sidewall of the opening.
3 more elements
Dependencies are inferred from the claim text.