Method of forming a group III-nitride crystalline film on a patterned substrate by hydride vapor phase epitaxy (HVPE)

A method of depositing a Group III-Nitride film comprising:

• providing a patterned substrate having a plurality of spaced apart features separated by a space, wherein said plurality of features have inclined sidewalls;
• growing a Group III-Nitride film by hydride vapor phase epitaxy (HVPE) on said patterned substrate such that a portion of said Group III-Nitride film is grown with a first crystal orientation having a first growth rate in said space between said features and such that a portion of said Group III-Nitride film is grown with a second crystal orientation having a second growth rate on said inclined sidewalls;
• and
• growing said Group III-Nitride film such that said portion of said Group III-Nitride film having said first crystal orientation grows from said space between said features laterally over said portion of said Group III-Nitride film having said second crystal orientation.