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US 8,507,188 B2Granted
Flexible micro/nanofluidic devices
AssigneePoc Microsolutions, S.L.
InventorsFrancisco Javier Blanco Barrio, Maria Aguirregabiria Izaguirre, Aitor Ezkerra Fernandez, Janette Lilian Maria Schulze, Jesús Miguel Ruano Lopez, Kepa Mayora Oria
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Abstract
The present invention relates to a method for manufacturing micro/nanofluidic devices that incorporate overhanging micromechanical and metal components monolithically integrated with the fluidic circuitry.
Claims16
A method for manufacturing micro/nano-fluidic devices comprising:
- a) depositing a thermosetting polymeric photo-resin on two substrates of biocompatible polymeric material, each of the substrates of biocompatible polymeric material covering the surface of one of two independent wafers, comprising a first wafer and a second wafer;
- b) performing a photolithography step at low temperature on the layers of thermosetting polymeric photo-resin deposited in step a);
- c) depositing metal type components on at least one wafer covered by the one of the substrates of biocompatible polymeric material and the polymeric photo-resin deposited in step a);
- d) microstructuring the metal-type components deposited in step c);
- e) depositing a layer of thermosetting polymeric photo-resin on the second wafer;
- f) performing a photolithography step at low temperature on the thermosetting polymeric photo-resin deposited on the second wafer;
- g) sealing at low temperature the first and second wafers obtained by superimposing the first and second wafers with the surfaces of the photo-resin facing one another;
- h) releasing the micro/nano-fluidic devices from the substrates of biocompatible polymeric material;
- i) cutting the micro/nano-fluidic devices.
6 more elements
Dependencies are inferred from the claim text.