Positive photosensitive composition

A photosensitive composition, comprising:

• a compound (A) represented by the following general formula (I);
• a siloxane polymer (B), which has alkali solubility and is synthesized by hydrolytic condensation of materials including two or more kinds of alkoxysilane compounds having different numbers of alkoxyl groups;
• a 1,2-quinone diazide compound (C);
• and
• a solvent (D) for dissolving the above-mentioned (A) to (C):
• wherein the alkoxysilane compounds include di-, tri- and tetra-functional alkoxysilane compounds,
• where:
• R's independently represent hydrogen, an alkyl group having 1 to 45 carbon atoms, a cycloalkyl group having 4 to 8 carbon atoms, or a substituted or unsubstituted aryl group having 6 to 10 carbon atoms;
• X's independently represent hydrogen, —Si(CH3)2H, —Si(CH3)3, —Si(CH3)2(CH2)3—OOCC(CH3)═CH2, —Si(CH3)2(CH2)3COOH, or a group represented by the following formula (II);
• in each of the alkyl group having 1 to 45 carbon atoms represented by R and the cycloalkyl group having 4 to 8 carbon atoms represented by R, any hydrogen may be replaced by fluorine, and any —CH2— may be replaced by —O— or a cycloalkylene group having 5 to 18 carbon atoms so long as the —CH2— is unadjacent to another —CH2—;
• and
• in a benzene ring of the substituted aryl group represented by R, any hydrogen bonded to the benzene ring may be independently replaced by an alkyl group having 1 to 10 carbon atoms or a halogen.