Method for producing at least one microcomponent with a single mask
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsSteve Martin, Nicolas Dunoyer, Sami Oukassi, Raphael Salot
Life of this patent
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Abstract
The microcomponent, for example a microbattery, comprising a stack with at least two superposed layers on a substrate, is made using a single steel mask able to expand under the effect of temperature. The mask comprises at least one off-centered opening. The mask being at a first temperature, a first layer is deposited through the opening of the mask. The mask being at a second temperature, higher than the first temperature, a second layer is deposited through the opening of the mask. Finally, the mask being at a third temperature, higher than the second temperature, a third layer is deposited through the opening of the mask.
Claims14
Method for producing at least a microcomponent comprising at least a stack of layers on a substrate, the stack comprising a first layer defining a first pattern and a second layer defining a second pattern, different from the first pattern, the method comprising the successive steps of:
- placing a mask comprising an opening above the substrate so that it can expand or retract by sliding on the surface of the substrate, a center portion of the mask being immobile with respect to the substrate during and between deposition steps;
- depositing the first layer through the opening of the mask at a first temperature to form the first pattern;
- heating the same mask to a second temperature, different from the first temperature;
- and
- depositing the second layer through the same opening of the mask at the second temperature to form the second pattern shifted from the first pattern and overlapping the first pattern.
Dependencies are inferred from the claim text.