Method for adhering a microfluidic chip to a substrate

A method for adhering a microfluidic chip to a substrate comprising:

• providing a first layer;
• providing a second layer;
• providing a third layer;
• providing a fourth layer;
• providing a fifth layer having at least one microfluidic channel;
• depositing the second layer on the first layer;
• depositing the third layer on the second layer;
• exposing the second layer by forming one or more openings in the third layer;
• after said exposing the second layer, performing one or more perforations through the second layer to expose the first layer through the one or more perforations;
• after said performing one or more perforations through the second layer, undercutting the second layer through at least one of the one or more perforations to provide at least one anchor shaped hole in the first layer, the at least one anchor shaped hole having a width larger than the at least one of the one or more perforations;
• after said undercutting the second layer through at least one of the one or more perforations, selectively removing the third layer;
• after said selectively removing the third layer, depositing the fourth layer on the second layer thus filling the at least one anchor shaped hole;
• after said depositing the fourth layer, aligning the fifth layer with the fourth layer;
• and
• after said aligning the fifth layer, bonding the fifth layer to the fourth layer.