Three-dimensional nanochannel device and method of manufacturing the same

Abstract

A three-dimensional nanochannel device and a method of manufacturing the same are provided. In the device, a first substrate, a second substrate, and a channel layer sandwiched by the first and the second substrates are included. At least one channel is constituted by the first and the second substrates and the channel layer and includes a fluid inlet, a fluid outlet, and at least one condensed channel between the fluid inlet and the fluid outlet. The condensed channel at least has a first size and a second size on an X-Y plane and has a third size and a fourth size on an X-Z plane. A difference between the first size and the second size is about at least two orders in scale, and a difference between the third size and the fourth size is about at least two orders in scale.

Dependencies are inferred from the claim text.