Drive end-block for a rotatable magnetron
AssigneeVon Ardenne Anlagentechnik GmbH
InventorsHans-Juergen Heinrich, Sven Haehne
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Abstract
A drive end block for a magnetron arrangement with a rotating target, comprises an end block housing having a rotatably mounted drive shaft. The drive shaft is arranged in the end block housing, accessible at an end from outside of the end block housing for connection to the rotating target, and adapted at its end inside the end block housing for introduction of a torque. An electric motor with a stator and a rotor for creating the torque is arranged inside the end block housing.
Claims13
A drive end block for a magnetron arrangement with a rotating target arranged in a vacuum chamber, comprising an end block housing situated entirely beyond an end of the target within the vacuum chamber and having a rotatably mounted drive shaft arranged in the end block housing and accessible at an end from outside of the end block housing for connection to the rotating target and adapted at an end inside the end block housing for introduction of a torque, and an electric motor comprising a stator and a rotor for creating the torque, wherein the electric motor is arranged inside the end block housing and rotates the target.
Dependencies are inferred from the claim text.