Rectangular parallelepiped fluid storage and dispensing vessel
AssigneeAdvanced Technology Mateials, Inc.
InventorsDennis Brestovansky, Michael J. Wodjenski, Jose I. Arno, J. Donald Carruthers, Phillip A. Moroco
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Abstract
A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
Claims9
A method of fabricating a gas source package, said method comprising:
- introducing a monolithic carbon physical adsorbent material into an interior volume of a metal tube closed at a first end thereof and open at a second end thereof, said monolithic carbon physical adsorbent material comprising multiple monolithic articles, each of cylindrical form, abutting one another in face-to-face contact;
- and
- after introduction of said monolithic carbon physical adsorbent material into the interior volume of said tube, welding a flat top plate member to the second end of the tube to enclose the interior volume, wherein the top plate member has a central opening arranged to leak-tightly engage a fluid dispensing assembly.
Dependencies are inferred from the claim text.