Process for purification of monosilane
AssigneeKcc Corporation
InventorsKyoung Hoon Kang, Yoon Jun Kim, Kyong Bok Hur, Moon Gue Jun
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Abstract
Provided is a method of purifying monosilane. More particularly, the method includes removing impurities from a crude material containing monosilane and ethylene by fractional distillation (operation 1), and removing ethylene and residual impurities by passing the crude material purified in operation 1 through activated carbon (operation 2). According to the method, high-purity monosilane may be more simply and effectively obtained without additional production of byproducts by selectively adsorbing ethylene, which is difficult to separate by fractional distillation, using an activated carbon.
Claims8
A method of purifying monosilane, comprising passing a crude material containing monosilane and ethylene through activated carbon having a pore diameter of 0.4 to 0.7 nm, a specific surface area of 250 to 400 m2/g and a total pore volume of 0.1 to 0.3 cm3/g to remove ethylene and residual impurities, wherein the crude material contains more than 1 ppm ethylene.
Dependencies are inferred from the claim text.