Method and structure of monolithetically integrated microneedle biochip
AssigneemCube Inc.
InventorXiao (Charles) Yang
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Abstract
The present invention provides a method and device using CMOS and MEMS fabrication techniques for making an integrated microneedle device with integrated circuits. Merely by way of example, the technology can be applied to bio and chemical sensing, and other bioMEMS applications. In some embodiments, the integrated circuits are completed using standard IC processes. For example, an array of microneedles are fabricated on top of the IC substrate followed by formation of micro fluidic channels in the substrate. On-chip integrated circuits enable real-time sensing and intelligent drug delivery.
Claims8
An integrated biosensor and circuit device comprising:
- a semiconductor substrate comprising a surface region;
- a CMOS integrated circuit layer overlying the surface region;
- one or more dielectric layers overlying the CMOS integrated circuit layer;
- a fluid chamber region overlying the CMOS integrated circuit layer;
- one or more needle devices in communication with the fluid chamber region, the one or more needle devices overlying the CMOS integrated circuit layer, each of the needle devices having fluid channel therein, the fluid channel extending from a base region to a vicinity of a tip region, the one or more needle devices being configured to be supported by one or more members integrally formed overlying the CMOS integrated circuit device layer;
- and
- one or more sensing devices coupled to the one or more needle devices, the one or more sensing devices provided from the CMOS integrated circuit device layer.
Dependencies are inferred from the claim text.