Substrate holder and substrate holding method
AssigneeEbara Corporation
InventorsTamami Takahashi, Hiroaki Kusa, Masaya Seki
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Abstract
A substrate holder is a mechanism for holding a substrate, to be polished, by vacuum suction. The substrate holder includes a substrate-holding stage having a suction surface for the substrate, and a fluid passage selectively coupled to a vacuum source and a fluid supply source. The suction surface has a plurality of closed sections surrounded by convexities, and the fluid passage includes a plurality of communication passages which are in fluid communication with the plurality of closed segments respectively and independently.
Claims10
A substrate holder for holding a substrate by vacuum suction, said substrate holder comprising:
- a substrate-holding stage having a suction surface for the substrate;
- and
- a fluid passage selectively coupled to a vacuum source and a fluid supply source,
- wherein said suction surface has a plurality of closed sections surrounded by convexities,
- wherein said fluid passage includes a plurality of communication passages which are in fluid communication with said plurality of closed segments respectively and independently;
- said substrate-holding stage has a suction pad to be brought into contact with the substrate;
- and
- said convexities are formed by said suction pad.
A substrate holder for holding a substrate by vacuum suction, said substrate holder comprising:
- a substrate-holding stage having a suction surface for the substrate;
- and
- a fluid passage selectively coupled to a vacuum source and a fluid supply source,
- wherein said suction surface has a plurality of closed sections surrounded by convexities,
- wherein said fluid passage includes a plurality of communication passages which are in fluid communication with said plurality of closed segments respectively and independently,
- wherein said substrate-holding stage has a sheet suction pad to be brought into contact with the substrate;
- and
- wherein said convexities and said closed sections are formed on a surface of said suction pad.
Dependencies are inferred from the claim text.