System and method for in-situ inspection during metallurgical cross-sectioning
AssigneeApplied Micro Circuits Corporation
InventorJoseph Martin Patterson
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AssigneeApplied Micro Circuits Corporation
InventorJoseph Martin Patterson
Estimating the term…
A system and method are provided for in-situ inspection optical inspection during a parallel polishing process. The method provides a polishing device with a spindle bit for holding a metallurgical sample, and a rotatable wheel having an inner diameter with a top surface for accepting a polishing compound and a transparent outer diameter. An optical system underlies the wheel outer diameter for recording images of the metallurgical sample. The method polishes the metallurgical sample against the wheel inner diameter. Without releasing the metallurgical sample from the spindle bit, the metallurgical sample is moved to a first position overlying the wheel outer diameter, and the metallurgical sample is optically inspected. In one aspect, the polishing device has a cleaning system overlying the wheel outer diameter, and the method sprays the wheel outer diameter with cleaning solution to support an in-situ inspection.
A polishing device with an in-situ optical inspection system, the polishing device comprising:
A system for performing metallurgical polishing with in-situ inspection, comprising:
Dependencies are inferred from the claim text.