# US 8,504,148 B2 · Neural device having via-hole connection and using at least one nano-wire

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- Number: US 8,504,148 B2
- Document ID: US8504148B2
- Status: Granted
- Kind: B2
- Application number: 13/055,670
- Filed: 2010-10-08
- Published: 2012-05-24
- Granted: 2013-08-06
- Earliest claimed: 2010-05-11
- Assignees: Industry-Academic Cooperation Foundation, Yonsei University; I3SYSTEM, Inc.
- Applicants: Donghyun Kim; Jongill Hong; Gunhee Han; Taewook Kim; Heonjin Choi; Seunghan Park; Seongyeol Pyo; Sooho Bae; Han Chung
- Inventors: Donghyun Kim; Jongill Hong; Gunhee Han; Taewook Kim; Heonjin Choi; Seunghan Park; Seongyeol Pyo; Sooho Bae; Han Chung
- Web page: https://patentgrep.com/patent/US8504148B2

## CPC

- A61N 1/37205: {Microstimulators, e.g. implantable through a cannula}
- A61B 5/24: Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
- B82Y 5/00: Nanobiotechnology or nanomedicine, e.g. protein engineering or drug delivery
- A61B 2562/0285: Nanoscale sensors
- A61N 1/0551: {Spinal or peripheral nerve electrodes}
- A61N 1/3605: {Implantable neurostimulators for stimulating central or peripheral nerve system}
- A61N: ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY (measurement of bioelectric currents A61B; surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body A61B18/00; anaesthetic apparatus in general A61M; incandescent lamps H01K; infrared radiators for heating H05B)
- A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES

## Abstract

Provided is a neural device including at least one nano-wire. The neural device includes a nano-wire formed on a base formed on a first surface of a substrate, and an electrode pad formed on a second surface different from the first surface of the substrate and configured to output an electrical signal gained from a neural fiber through the nano-wire or apply a signal for an electric stimulus to the nano-wire. Therefore, it is possible to prevent the nano-wire from becoming embedded in an encapsulation and maximize a contact between the nano-wire and a nerve.

## Claims

### Claim 1

A neural device comprising:
a nano-wire formed on a base which is formed on a first surface of a substrate; and
an electrode pad formed on a second surface different from the first surface of the substrate, and configured to output an electrical signal gained from a neural fiber through the nano-wire or apply a signal for an electric stimulus to the nano-wire,
wherein the second surface is a surface having an angle of 170° to 180° between a normal vector of the second surface and a normal vector of the first surface, and the nano-wire and the electrode pad are connected to each other using a through via-hole, and
wherein the electrode pad is connected to the outside of the neural device through a touch ball.

### Claim 2 (depends on 1)

The neural device according to claim 1, wherein the through via-hole is disposed outside of a CMOS region of the substrate.

### Claim 3 (depends on 2)

The neural device according to claim 2, wherein the base comprises a through-hole connected to the through via-hole and a nano-wire support frame configured to support the nano-wire.

### Claim 4 (depends on 3)

The neural device according to claim 3, wherein the nano-wire is formed by a catalyst disposed on the nano-wire support frame through a lithography process and a reactant supplied through a chemical vapor deposition (CVD) process and reacting with the catalyst.

### Claim 5 (depends on 3)

The neural device according to claim 3, wherein the nano-wire is formed by etching a periphery of the nano-wire.

### Claim 6

A nano-wire probe device comprising:
a touch ball electrically connected to an electrode pad to be connected to a device; and
a nano-wire formed on a base which is formed on a substrate, wherein the electrode pad is on a side of the substrate and the base is on the opposite side of the substrate, and the nano-wire is configured to provide an electrical signal measured from a neural fiber to the device through the touch ball or apply an electrical stimulus on the basis of a signal applied from the device through the touch ball.

### Claim 7 (depends on 6)

The nano-wire probe device according to claim 6, wherein the electrode pad and the nano-wire are connected to each other using a through via-hole.

### Claim 8 (depends on 7)

The nano-wire probe device according to claim 7, wherein the base comprises a through-hole connected to the through via-hole and a nano-wire support frame configured to support the nano-wire.

### Claim 9 (depends on 8)

The nano-wire probe device according to claim 8, wherein the nano-wire is formed by a catalyst disposed on the nano-wire support frame through a lithography process and a reactant supplied through a chemical vapor deposition (CVD) process and reacting with the catalyst.

### Claim 10 (depends on 8)

The nano-wire probe device according to claim 8, wherein the nano-wire is formed by etching a periphery of the nano-wire.
