A semiconductor device member having a siloxane skeletal structure serving as a basic skeleton, a silicon content of 25 weight % or more, and a ratio of (total area of peaks of the chemical shift of less than −40 ppm or more and 0 ppm or less)/(total area of peaks of the chemical shift of less than −40 ppm) in a solid Si-nuclear magnetic resonance spectrum of 3 or more and 200 or less, the semiconductor device member having a weight loss at the time of heating of 50 weight % or lower, and a measurement value of hardness (Shore A) by durometer type A of 5 or larger and 90 or smaller;
- wherein the weight-loss is measured by
- obtaining a 10-mg fragment of said semiconductor device member, heating said fragment from 35° C. to 500° C. at a temperature rising rate of 10° C./min under 200-ml/min flow of air, and measuring the weightloss with a thermogravimetric/differential thermal analyzer.