Scanning probe microscopy inspection and modification system
OwnerVictor B. Kleyinventor
Life of this patent
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Abstract
A scanning probe microscopy (SPM) inspection and/or modification system which uses SPM technology and techniques. The system includes various types of microstructured SPM probes for inspection and/or modification of the object. The components of the SPM system include microstructured calibration structures. A probe may be defective because of wear or because of fabrication errors. Various types of reference measurements of the calibration structure are made with the probe or vice versa to calibrate it. The components of the SPM system further include one or more tip machining structures. At these structures, material of the tips of the SPM probes may be machined by abrasively lapping and chemically lapping the material of the tip with the tip machining structures.
Claims14
A microstructured force balance that comprises:
- a base;
- a contact platform;
- a suspension system connected to the base and the contact platform to displaceably suspend the contact platform over the base, the contact platform being displaced by varying amounts of displacement when varying amounts of force are applied to the contact platform by contacting the contact platform;
- a displacement actuator to selectively apply varying amounts of force to the contact platform to selectively cause varying amounts of displacement of the contact platform with respect to the base;
- and
- an enclosure that encloses the contact platform, the suspension system, and displacement actuator, wherein:
- the enclosure includes a flexible membrane overlying the contact platform;
- the enclosure includes a main body that is connected to portions of the base outboard of the contact platform and extends upwardly and inwardly therefrom;
- the main body is formed with an aperture surrounding at least a portion of the contact platform;
- and
- the flexible membrane is connected to the main body so as to seal off the aperture.
Dependencies are inferred from the claim text.