Capacitor structure
AssigneeInternational Business Machines Corporation
InventorNing Lu
Life of this patent
Estimating the term…
Abstract
The disclosure relates generally to capacitor structures and more particularly, to capacitor structures having interdigitated metal fingers. Metal finger capacitors may have at least one layer, the at least one layer including: a first set of fingers, wherein each finger of the first set includes an end integrally connected to a bus segment of a first bus; a second set of fingers interdigitated with the first set of fingers, wherein each finger of the second set includes an end integrally connected to a bus segment of a second bus; an in port integrally connected to the first bus and an out port integrally connected to the second bus; and wherein a width of the first and second bus is non-uniform across a length of the first and second bus.
Claims20
A metal finger capacitor (MFCAP) comprising at least one layer, the at least one layer including:
- a first set of fingers, wherein each finger of the first set includes an end integrally connected to a first bus, the first bus including a plurality of first bus segments;
- a second set of fingers interdigitated with the first set of fingers,
- wherein each finger of the second set includes an end integrally connected to a second bus, the second bus including a plurality of second bus segments;
- and
- an in port integrally connected to the first bus and an out port integrally connected to the second bus;
- wherein a width of the first and second bus is non-uniform across a length of the first and second bus, and
- wherein a width of each of the first bus segments is based on a proximity to the in port, the width of all of the first bus segments increasing the more proximate each of the first bus segments is to the in port, and
- wherein a width of each of the second bus segments is based on a proximity to the out port.
A metal finger capacitor (MFCAP) comprising at least one layer, the at least one layer including:
- a first set of fingers, wherein each finger of the first set includes an end integrally connected to a bus segment of a first bus;
- a second set of fingers interdigitated with the first set of fingers, wherein each finger of the second set includes an end integrally connected to a bus segment of a second bus;
- and
- an in port integrally connected to the first bus and an out port integrally connected to the second bus;
- wherein the first bus and the second bus include a plurality of bus segments and widths of bus segments of the first and the second buses are non-uniform across a length of the first and second bus, and
- wherein a width of each of the bus segments of the first bus is increased the more proximate each bus segment is to the in port.
A metal finger capacitor (MFCAP) comprising at least one layer, the at least one layer including:
- an in port disposed on the at least one layer;
- a first bus integrally connected to the in port, the first bus including a plurality of first bus segments,
- wherein a width of each of the first bus segments is related to a proximity to the in port, the width of each of the first bus segments decreasing in relation to an increase in distance from the in port;
- a second bus proximate to the first bus;
- an out port integrally connected to the second bus;
- a first set of fingers,
- wherein each finger of the first set includes an end integrally connected to at least one first bus segment of the first bus, and
- wherein each of the first bus segments is directly connected to at least one finger in the first set of fingers;
- and
- a second set of fingers interdigitated with the first set of fingers,
- wherein each finger of the second set includes an end integrally connected to the second bus.
Dependencies are inferred from the claim text.