Method of forming a dielectric slope for EAMR and magnetic writer

A method of forming an energy assisted magnetic recording (EAMR) writer, the method comprising:

• providing a structure comprising a bottom cladding layer and a near field transducer (NFT);
• forming a patterned sacrificial layer over the structure;
• depositing a top cladding layer over the patterned sacrificial layer and a remaining region of the structure not covered by the patterned sacrificial layer;
• forming a patterned resist over the top cladding layer;
• and
• performing a first etching operation on the to cladding layer via the patterned resist
• whereby a top cladding having a sloped region is formed,
• wherein the patterned sacrificial layer provides an etch stop for the first etching operation;
• and
• wherein the step of forming the patterned resist comprises forming a photoresist and reflowing the photoresist at an elevated temperature to form a sloped resist region in the photoresist.

A method of forming an energy assisted magnetic recording (EAMR) writer, the method comprising:

• providing a structure comprising a bottom cladding layer and a near field transducer (NFT);
• forming a patterned sacrificial layer over the structure;
• depositing a top cladding layer over the patterned sacrificial layer and a remaining region of the structure not covered by the patterned sacrificial layer;
• forming a patterned resist over the top cladding layer;
• performing a first etching operation on the to cladding layer via the patterned resist, and
• performing a second etching operation to remove the patterned sacrificial layer;
• whereby a top cladding having a sloped region is formed,
• wherein the patterned sacrificial layer provides an etch stop for the first etching operation;
• and wherein:
• the patterned sacrificial layer comprises a proximate portion disposed proximate to an air bearing surface (ABS) of the EAMR writer and a distal portion opposite to the proximate portion;
• the distal portion is disposed below the sloped cladding region of the top cladding after completion of the first etching operation;
• and
• the second etching operation removes the distal portion of the patterned sacrificial layer as well as a remainder of the patterned sacrificial layer, whereby an undercut is formed in the sloped cladding region.