Charged particle collector for a CMOS imager
AssigneeExelis, Inc.
InventorsDan Wesley Chilcott, William J. Baney, John Richard Troxell
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Abstract
Charged particle sensing devices and methods of forming charged particle sensing devices are provided. The charged particle sensing device includes a source of charged particles, a plurality of collector electrodes for receiving a first portion of the charged particles and a grid formed around and spaced apart from the plurality of collector electrodes. The grid receives a second portion of the charged particles and directs backscattered charged particles, generated responsive to the second portion, to adjacent collector electrodes.
Claims20
A charged particle sensing device comprising:
- a source of charged particles;
- a plurality of collector electrodes for receiving a first portion of the charged particles from the source of charged particles;
- and
- a grid formed around and spaced apart from the plurality of collector electrodes, the grid receiving a second portion of the charged particles from the source of charged particles and directing backscattered charged particles, generated responsive to the second portion, to adjacent collector electrodes,
- wherein the grid is isolated from the plurality of collector electrodes by a gap, and the gap is devoid of any dielectric materials.
A charged particle sensing device comprising:
- a source of charged particles;
- and
- a charged particle collection surface for receiving the charged particles from the source of charged particles, the charged particle collection surface including:
- a plurality of collector electrodes, and
- a grid formed around and spaced apart from the plurality of collector electrodes,
- wherein one of the grid and the plurality of collector electrodes includes a raised edge spaced apart from the charged particle collection surface, and
- the grid is isolated from the plurality of collector electrodes by a gap, and the gap is devoid of any dielectric materials.
Dependencies are inferred from the claim text.