US 8,479,309 B2 · Ultra-low damping imaging mode related to scanning probe microscopy in liquid

Abstract

Provided are methods and systems for high resolution imaging of a material immersed in liquid by scanning probe microscopy. The methods further relate to imaging a material submersed in liquid by tapping mode atomic force microscopy (AFM), wherein the AFM has a microfabricated AFM probe comprising a nanoneedle probe connected to a cantilever beam. The nanoneedle probe is immersed in the liquid, and the rest of the AFM probe, including the cantilever beam to which the nanoneedle probe is attached, remains outside the liquid. The cantilever is oscillated and the nanoneedle probe tip taps the material to image the material immersed in liquid. In an aspect, the material is supported on a shaped substrate to provide a spatially-varying immersion depth with specially defined regions for imaging by any of the methods and systems of the present invention.

Claims29

Dependent claims

A method of imaging a material submersed in liquid by tapping mode atomic force microscopy, said method comprising the steps of:

providing the material submersed in liquid, wherein said material has a submersion depth in said liquid;
providing a microfabricated atomic force microscope probe comprising:
a cantilever beam having a distal end;
a nanoneedle probe having a first end connected to the distal end of the cantilever beam and a second end ending in a tip, wherein the nanoneedle probe has a longitudinally-extending axis extending between said first end and said second end that is substantially perpendicular to a surface of the cantilever beam distal end;
immersing a portion of said nanoneedle in said liquid, wherein said nanoneedle immersed portion is sufficient for the tip end to contact the material submersed in liquid and the cantilever beam remains outside said liquid;
and
oscillating said cantilever beam at an oscillating frequency, wherein the nanoneedle probe tip taps said material during said oscillation, thereby imaging said material in liquid.

4 more elements

Dependencies are inferred from the claim text.

Ultra-low damping imaging mode related to scanning probe microscopy in liquid

Life of this patent

Ultra-low damping imaging mode related to scanning probe microscopy in liquid

Life of this patent

Abstract

Claims29